According to one embodiment, a polymer material is disclosed. The polymer material contains a polymer. The polymer contains a first monomer unit having a lone pair and an aromatic ring at a side chain, and a second monomer unit including a crosslinking group at a terminal of the side chain, with its molar ratio of 0.5 mol % to 10 mol % to all monomer units in the polymer. The polymer material can be used for manufacturing a composite film as a mask pattern for processing a target film on a substrate. The composite film can be formed by a process including, forming an organic film on the target film with the polymer material, patterning the organic film, and forming the composite film by impregnating a metal compound into the patterned organic film.
                            根据一个实施方案,公开了一种聚合物材料。该聚合物材料包含一种聚合物。该聚合物包含第一单体单元和第二单体单元,第一单体单元在侧链上具有孤对和芳香环,第二单体单元在侧链的末端包括交联基团,其与聚合物中所有单体单元的摩尔比为 0.5 摩尔%至 10 摩尔%。该聚合物材料可用于制造复合薄膜,作为在基底上加工目标薄膜的掩模图案。复合薄膜的形成过程包括:用聚合物材料在目标薄膜上形成有机薄膜,对有机薄膜进行图案化,以及通过将
金属化合物浸渍到图案化的有机薄膜中形成复合薄膜。