PHOTOSENSITIVE COMPOSITION, PATTERN FORMING METHOD USING THE PHOTOSENSITIVE COMPOSITION AND COMPOUND FOR USE IN THE PHOTOSENSITIVE COMPOSITION
申请人:Wada Kenji
公开号:US20100233617A1
公开(公告)日:2010-09-16
A photosensitive composition includes: (A) a resin containing a repeating unit corresponding to a compound represented by the following formula (I); the resin being capable of producing an acid group upon irradiation with an actinic ray or radiation:
Z-A-X—B—R (I)
wherein Z represents a group capable of becoming an acid group resulting from leaving of a cation upon irradiation with an actinic ray or radiation; A represents an alkylene group; X represents a single bond or a heteroatom-containing divalent linking group; B represents a single bond, an oxygen atom or —N(Rx)-; Rx represents a hydrogen atom or a monovalent organic group; R represents a monovalent organic group substituted by Y; when B represents —N(Rx)-, R and Rx may combine with each other to form a ring; and Y represents a polymerizable group.
Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition and resist film
申请人:FUJIFILM CORPORATION
公开号:US10248019B2
公开(公告)日:2019-04-02
A pattern forming, method, includes: (i) forming a film from an actinic ray-sensitive or radiation-sensitive resin composition that contains (A) a compound capable of generating an acid upon irradiation with an actinic ray or radiation and decomposing by an action of an acid to decrease a solubility of the compound (A) for an organic solvent; (ii) exposing the film; and (iii) performing development by using a developer containing an organic solvent.
Die elektrochemische Fluorierung von Alkansulfonamiden und Alkandisulfonamiden
作者:P. Satori、C. Jünger
DOI:10.1016/0022-1139(96)03478-1
日期:1996.7
Alkane sulphonylamides and disulphonylamides are stable in anhydrous (HF)x and undergo quantitative fission of S-N bonds during electrochemical fluorination. Besides NF3, the corresponding perfluoroalkane sulphonyl fluorides and disulphonyl fluorides are formed.