A resist composition including: a base component (A) which exhibits changed solubility in an alkali developing solution under action of acid; and an acid-generator component (B) which generates acid upon exposure, wherein said acid-generator component (B) comprises an acid generator (B1) including a compound represented by general formula (b1-11) shown below:
wherein R
7″
to R
9″
each independently represent an aryl group or an alkyl group, wherein two of R
7″
to R
9″
may be bonded to each other to form a ring with the sulfur atom, and at least one of R
7″
to R
9″
represents a substituted aryl group having a group represented by general formula (I) shown below as a substituent; X
−
represents an anion; and R
f
represents a fluorinated alkyl group.
一种抗蚀组合物,包括:一种基础组分(A),在酸的作用下在碱性显影液中表现出改变的溶解度;以及一种酸发生剂组分(B),在暴露后生成酸,其中所述酸发生剂组分(B)包括一种酸发生剂(B1),该酸发生剂(B1)包括下式(b1-11)所示的化合物:其中R7''至R9''各自独立地表示芳基或烷基,其中R7''至R9''中的两个可以结合形成带有
硫原子的环,并且至少一个R7''至R9''表示带有下式(I)所表示的基团作为取代基的取代芳基;X-表示阴离子;Rf表示
氟化烷基。