A radiation-sensitive resin composition contains: a polymer that includes a structural unit including an acid-labile group; and a radiation-sensitive acid generating agent. The radiation-sensitive acid generating agent includes a sulfonate anion and a radiation-sensitive cation. The sulfonate anion includes two or more rings, and an iodine atom and a monovalent group having 0 to 10 carbon atoms which includes at least one of an oxygen atom and a nitrogen atom bond to at least one of the two or more rings. The ring is preferably an aromatic ring. The radiation-sensitive acid generating agent is preferably a compound represented by formula (1). In the formula (1), A
1
represents a group obtained from a compound which includes a ring having 3 to 20 ring atoms by removing (p+q+r+1) hydrogen atoms on the ring.
一种辐射敏感
树脂组合物包含:包括含有酸敏感基团的结构单元的聚合物;和辐射敏感酸发生剂。辐射敏感酸发生剂包括
磺酸根离子和辐射敏感阳离子。
磺酸根离子包括两个或两个以上的环,以及一个
碘原子和一个含有0至10个碳原子的一价基团,其中该基团至少包括一个氧原子和一个氮原子,与两个或两个以上的环中的至少一个结合。环最好是芳香环。辐射敏感酸发生剂最好是由式(1)表示的化合物。在式(1)中,A1表示通过去除环上(p+q+r+1)个氢原子而获得的由含有3至20个环原子的环的化合物得到的基团。