ALKOXIDE COMPOUND, RAW MATERIAL FOR FORMING THIN FILM, METHOD FOR MANUFACTURING THIN FILM, AND ALCOHOL COMPOUND
申请人:ADEKA CORPORATION
公开号:US20170121358A1
公开(公告)日:2017-05-04
An alkoxide compound is represented by General Formula (I) below:
wherein R
1
to R
3
each independently represent hydrogen, a C
1-12
hydrocarbon group, etc.; R
4
represents a C
1-12
hydrocarbon group, etc.; L represents hydrogen, halogen, a hydroxyl group, an amino group, an azi group, a phosphido group, a nitrile group, a carbonyl group, a C
1-12
hydrocarbon group, etc.; and M represents a metal atom or a silicon atom, n represents an integer of 1 or more, m represents an integer of 0 or more, and n+m represents the valence of the metal atom or silicon atom.
一种烷氧化合物由下面的一般式(I)表示:其中R1至R3分别独立表示氢、C1-12烃基等;R4表示C1-12烃基等;L表示氢、卤素、羟基、氨基、假氮基、磷基、腈基、羰基、C1-12烃基等;M表示金属原子或硅原子,n表示1或更多的整数,m表示0或更多的整数,n+m表示金属原子或硅原子的价数。