Fluorine-Containing Compound, Fluorine-Containing Polymer Compound, Resist Composition, Top Coat Composition And Pattern Formation Method
申请人:Mori Kazunori
公开号:US20120077126A1
公开(公告)日:2012-03-29
A fluorine-containing polymer of the present invention contains a repeating unit (a) of the general formula (2) and has a mass-average molecular weight of 1,000 to 1,000,000. This polymer is suitably used in a resist composition for pattern formation by high energy ray radiation of 300 nm or less wavelength or electron beam radiation or a top coat composition for liquid immersion lithography and is characterized as having high water repellency, notably high receding contact angle.
In the formula, R
1
represents a polymerizable double bond-containing group; R
2
represents a fluorine atom or a fluorine-containing alkyl group; R
8
represents a substituted or unsubstituted alkyl group or the like; and W
1
represents a single bond, a substituted or unsubstituted methylene group or the like.
本发明的含氟聚合物包含通式(2)的重复单元(a),其具有1,000至1,000,000的质量平均分子量。该聚合物适用于抗高能辐射(波长小于或等于300nm的高能射线辐射或电子束辐射)的光阻组合物,或用于液体浸没光刻的面涂层组合物,并具有高水珠性,尤其是高后退接触角。在公式中,R1表示可聚合的双键含有的基团;R2表示氟原子或含氟烷基;R8表示取代或未取代的烷基或类似物;W1表示单键,取代或未取代的亚甲基或类似物。