Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same
申请人:Harada Yukako
公开号:US20080081293A1
公开(公告)日:2008-04-03
The present invention provides a salt represented by the formula (I):
wherein P
1
, P
2
and P
3
each independently represent a C1-C30 alkyl group which may be substituted with at least one selected from a hydroxyl group, a C3-C12 cyclic hydrocarbon group and a C1-C12 alkoxy group, or a C3-C30 cyclic hydrocarbon group which may be substituted with at least one selected from a hydroxyl group and a C1-C12 alkoxy group, provided that all of P
1
, P
2
and P
3
are not simultaneously phenyl groups which may be substituted,
Q
1
and Q
2
each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, and R represents
a group represented by the formula:
wherein A
1
represents —OH or —Y
1
—OH, n represents an integer of 1 to 9, and Y
1
represents a divalent C1-C6 saturated aliphatic hydrocarbon group;
a group represented by the formula:
wherein ring X
1
represents a C3-C30 monocyclic or polycyclic hydrocarbon group in which one —CH
2
— group is substituted with —CO—, and at least one hydrogen atom in the monocyclic or polycyclic hydrocarbon group may be substituted with a C1-C6 alkyl group, a C1-C6 alkoxy group, a C1-C4 perfluoroalkyl group, a C1-C6 hydroxyalkyl group, a hydroxyl group or a cyano group;
a group represented by the formula:
wherein ring X
2
represents a C3-C30 monocyclic or polycyclic hydrocarbon group in which a hydrogen atom of one —CH
2
— group is substituted with a hydroxyl group, and at least one hydrogen atom in the monocyclic or polycyclic hydrocarbon group may be substituted with a C1-C6 alkyl group, a C1-C6 alkoxy group, a C1-C4 perfluoroalkyl group, a C1-C6 hydroxyalkyl group, a hydroxyl group or a cyano group;
a group represented by the formula:
wherein ring X
3
represents a C3-C30 monocyclic or polycyclic hydrocarbon group in which one —CH
2
— group is substituted with —COO—, and at least one hydrogen atom in the monocyclic or polycyclic hydrocarbon group may be substituted with a C1-C6 alkyl group, a C1-C6 alkoxy group, a C1-C4 perfluoroalkyl group, a C1-C6 hydroxyalkyl group, a hydroxyl group or a cyano group, and m represents an integer of 0 to 12; or
a group represented by the formula:
wherein ring X
4
represents a C6-C30 polycyclic hydrocarbon group having tricycle or more, and at least one hydrogen atom in the polycyclic hydrocarbon group may be substituted with a C1-C6 alkyl group, a C1-C6 alkoxy group, a C1-C4 perfluoroalkyl group, a C1-C6 hydroxyalkyl group or a cyano group, and l represents an integer of 1 to 12.
The present invention further provides a chemically amplified resist composition comprising the salt represented by the above-mentioned formula (I).
本发明提供了一种盐,其表示为公式(I):其中P1、P2和P3各自独立地表示一个C1-C30烷基基团,该基团可以被至少一个羟基、一个C3-C12环烃基团和一个C1-C12烷氧基中的至少一个取代,或者一个C3-C30环烃基团,该基团可以被至少一个羟基和一个C1-C12烷氧基中的至少一个取代,前提是P1、P2和P3均不同时为可以被取代的苯基;Q1和Q2各自独立地表示氟原子或者C1-C6全氟烷基基团,R表示由以下公式表示的一个基团:其中A1表示—OH或—Y1—OH,n表示1到9之间的整数,Y1表示二价的C1-C6饱和脂肪族碳氢基团;一个由以下公式表示的基团:其中环X1表示一个C3-C30的单环或多环碳氢基团,其中一个—CH2—基团被—CO—取代,并且单环或多环碳氢基团中的至少一个氢原子可以被C1-C6烷基基团、C1-C6烷氧基、C1-C4全氟烷基基团、C1-C6羟基烷基基团、羟基或氰基取代;一个由以下公式表示的基团:其中环X2表示一个C3-C30的单环或多环碳氢基团,其中一个—CH2—基团的氢原子被羟基取代,并且单环或多环碳氢基团中的至少一个氢原子可以被C1-C6烷基基团、C1-C6烷氧基、C1-C4全氟烷基基团、C1-C6羟基烷基基团、羟基或氰基取代;一个由以下公式表示的基团:其中环X3表示一个C3-C30的单环或多环碳氢基团,其中一个—CH2—基团被—COO—取代,并且单环或多环碳氢基团中的至少一个氢原子可以被C1-C6烷基基团、C1-C6烷氧基、C1-C4全氟烷基基团、C1-C6羟基烷基基团、羟基或氰基取代,m表示0到12之间的整数;或者一个由以下公式表示的基团:其中环X4表示一个具有三环或更多的C6-C30多环碳氢基团,多环碳氢基团中的至少一个氢原子可以被C1-C6烷基基团、C1-C6烷氧基、C1-C4全氟烷基基团、C1-C6羟基烷基基团或氰基取代,l表示1到12之间的整数。本发明还提供了一种化学增感抗蚀组合物,其包含上述公式(I)表示的盐。