Universal building blocks and support media for synthesis of oligonucleotides and their analogs
申请人:——
公开号:US20040152905A1
公开(公告)日:2004-08-05
Compounds for the synthesis of oligomeric compounds, particularly oligonucleotides and chemically modified oligonucleotide analogs, are provided. In addition, methods for functionalization of a support medium with a first monomeric subunit and methods for the synthesis of oligomeric compounds utilizing the novel compounds bound to support media are provided.
RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, COMPOUND AND ACID GENERATOR
申请人:Kawaue Akiya
公开号:US20120009521A1
公开(公告)日:2012-01-12
A resist composition including: a base component (A) which exhibits changed solubility in an alkali developing solution under action of acid; and an acid-generator component (B) which generates acid upon exposure, wherein said acid-generator component (B) comprises an acid generator (B1) including a compound represented by general formula (b1-11) shown below:
wherein R
7″
to R
9″
each independently represent an aryl group or an alkyl group, wherein two of R
7″
to R
9″
may be bonded to each other to form a ring with the sulfur atom, and at least one of R
7″
to R
9″
represents a substituted aryl group having a group represented by general formula (I) shown below as a substituent; X
−
represents an anion; and R
f
represents a fluorinated alkyl group.