A process produces vinyl ether compounds and includes allowing a vinyl ester compound represented by following Formula (1):
1
wherein R
1
, R
2
, R
3
and R
4
are the same or different and are each a hydrogen atom or an organic group, to react with a hydroxy compound represented by following Formula (2):
R
5
OH (2)
wherein R
5
is an organic group, in the presence of at least one transition element compound to thereby yield a vinyl ether compound represented by following Formula (3):
2
wherein R
2
, R
3
, R
4
and R
5
have the same meanings as defined above. Such transition element compounds include iridium compounds and other compounds containing Group VIII elements.
Polymerizable monomer polymeric compound resin compositions for photoresist and method for producing semiconductor
申请人:Koyama Hiroshi
公开号:US20060058480A1
公开(公告)日:2006-03-16
A polymerizable monomer of the present invention is represented by the following formula (1);
R
1
, R
2
and R
3
are each a hydrogen atom, a fluorine atom, an alkyl group or a fluoroalkyl group, W is a single bond or a linkage group and n is 0 or 1, where at least one of R
1
, R
2
and R
3
is a fluorine atom or a fluoroalkyl group when n=
1;
and the ring in the formula may have a substituent. The polymerizable monomer of the present invention can provide an appropriate hydrophilicity or hydrophilicity and transparency to a photoresist polymer.
Vinyl ether compounds and preparation process thereof
申请人:Daicel Chemical Industries, Ltd.
公开号:EP1288186A2
公开(公告)日:2003-03-05
A process produces vinyl ether compounds and includes allowing a vinyl ester compound represented by following Formula (1):
wherein R1, R2, R3 and R4 are the same or different and are each a hydrogen atom or an organic group, to react with a hydroxy compound represented by following Formula (2):
R5OH (2)
wherein R5 is an organic group, in the presence of at least one transition element compound to thereby yield a vinyl ether compound represented by following Formula (3):
wherein R2, R3, R4 and R5 have the same meanings as defined above. Such transition element compounds include iridium compounds and other compounds containing Group VIII elements.
A vinyl ether compound represented by following Formula (4):
wherein W is a divalent hydrocarbon; n is 0 or 1; m is an integer from 1 to 8; ring Z is any one of cyclic groups represented by following Formulae (5) through (12):
The present invention provides a method for producing an antifouling film having excellent antifouling properties and rubbing resistance. The method for producing an antifouling film of the present invention includes Process (1) of applying a resin to a surface of a substrate; Process (2) of pushing the substrate to a die with the resin in between to form an uneven structure on a surface of the resin; and Process (3) of curing the resin including the uneven structure on the surface thereof to form a polymer layer. The resin contains an antifouling agent that contains a compound containing a perfluoro(poly)ether group. The die includes a surface having undergone release treatment using a release agent containing a compound that contains a perfluoro(poly)ether group, a hydrolyzable group, and a Si atom.
FLUORINE-ATOM-CONTAINING POLYMERIZABLE UNSATURATED-MONOMER, FLUORINE-ATOM-CONTAINING POLYMERIC COMPOUND AND PHOTORESIST RESIN COMPOSITION
申请人:Koyama Hiroshi
公开号:US20050282985A1
公开(公告)日:2005-12-22
A fluorine-atom-containing polymerizable unsaturated-monomer of the present invention is represented by the following formula (1a) or (1b):
wherein each of a ring Z
1
and a ring Z
2
is an alicyclic carbon ring; when the alicyclic carbon ring is multi-cyclic, a part of atoms constituting the ring may be substituted by an oxygen atom, a sulfur atom or a nitrogen atom; an atom constituting the ring Z
1
and the ring Z
2
may have a substituent; each of R
1
, R
2
and R
3
is an alkyl group or a fluoroalkyl group; R is an specific unsaturated acyl group; provided that at least one of R
1
and R
2
is a fluorine atom or a fluoroalkyl group in the formula (1a), and in the formula (1b) (i) the ring Z
2
is bonded by a fluorine atom or a fluoroalkyl group, or (ii) R
3
is a fluoroalkyl group.
本发明的含氟原子可聚合不饱和单体由下式(1a)或(1b)表示:
其中每个环 Z
1
和环 Z
2
为脂环碳环;当脂环碳环为多环时,构成环的部分原子可被氧原子、硫原子或氮原子取代;构成环 Z
1
和环 Z
2
中的每个 R
1
, R
2
和 R
3
是烷基或氟烷基; R 是特定的不饱和酰基;条件是 R
1
和 R
2
在式(1a)中至少有一个是氟原子或氟烷基,在式(1b)中 (i) 环 Z
2
由氟原子或氟烷基键合,或 (ii) R
3
是氟烷基。