Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition and resist film
申请人:FUJIFILM CORPORATION
公开号:US10248019B2
公开(公告)日:2019-04-02
A pattern forming, method, includes: (i) forming a film from an actinic ray-sensitive or radiation-sensitive resin composition that contains (A) a compound capable of generating an acid upon irradiation with an actinic ray or radiation and decomposing by an action of an acid to decrease a solubility of the compound (A) for an organic solvent; (ii) exposing the film; and (iii) performing development by using a developer containing an organic solvent.