BETA-KETOIMINE LIGAND, METHOD OF PREPARING THE SAME, METAL COMPLEX COMPRISING THE SAME AND METHOD OF FORMING THIN FILM USING THE SAME
申请人:Samsung Electronics Co., Ltd.
公开号:US20140309456A1
公开(公告)日:2014-10-16
The β-ketoimine ligand is represented by the following formula 1:
wherein R1 and R2 are each independently a C1-C5 alkyl group. A metal complex compound includes the β-ketoimine ligand. A method of forming the β-ketoimine ligand and a method of forming a thin film using the metal complex compound including β-ketoimine ligand are provided.
β-酮亚胺配体由以下化学式1表示:其中R1和R2分别独立地是C1-C5烷基基团。金属配合物化合物包括β-酮亚胺配体。提供了形成β-酮亚胺配体的方法以及使用包括β-酮亚胺配体的金属配合物形成薄膜的方法。