An anti-reflective hardmask composition contains: (a) an arylcarbazole derivative polymer represented by the following Chemical Formula 1 or a polymer blend containing the same; and (b) an organic solvent
in Chemical Formula 1, A1 and A2 are each independently a (C6-C40) aromatic aryl group and are the same as or different from each other,
R is t-butyloxycarbonyl (t-BOC), ethoxyethyl, isopropyloxyethyl, or tetrahydropyranyl,
X1 and X2 are each a polymerization linkage group derived from aldehyde or an aldehyde acetal monomer capable of being one-to-one polymerized with an arylcarbazole derivative and A2 in the presence of an acid catalyst,
m/(m+n) is in a range of 0.05 to 0.8, and
a weight average molecular weight (Mw) of an the polymer is in a range of 1,000 to 30,000.
一种防反射硬面罩组合物含有:(a) 下述
化学式 1 所代表的芳基
咔唑衍
生物聚合物或含 有该衍
生物的聚合物混合物;以及 (b) 一种有机溶剂
在
化学式 1 中,A1 和 A2 各自独立地是(C6-C40)芳基,且彼此相同或不同、
R 是叔丁氧羰基(t-BOC)、乙氧基乙基、异丙氧基乙基或
四氢吡喃基、
X1 和 X2 分别是源自醛或醛
缩醛单体的聚合连接基团,可与芳基
咔唑衍
生物和 A2 在酸催化剂存在下进行一对一聚合、
m/(m+n) 在 0.05 至 0.8 之间,以及
聚合物的重量平均分子量(Mw)在 1,000 至 30,000 之间。