Photosensitive composition, pattern-forming method using the photosensitive composition and compounds used in the photosensitive composition
申请人:Wada Kenji
公开号:US20070148592A1
公开(公告)日:2007-06-28
A photosensitive composition containing a compound having a specific structure, a pattern-forming method using the photosensitive composition, and a compound having a specific structure used in the photosensitive composition.