Amine compounds, resist compositions and patterning process
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:US20020098443A1
公开(公告)日:2002-07-25
Novel amine compounds having a nitrogen-containing cyclic structure and a hydrating group such as a hydroxy, ether, ester, carbonyl, carbonate group or lactone ring are useful for use in resist compositions for preventing a resist film from thinning and also for enhancing the resolution and focus margin of resist.