申请人:——
公开号:US20040236051A1
公开(公告)日:2004-11-25
A process for producing a monomer for resists represented by the following general formula 1:
1
wherein R
1
represents hydrogen or an optionally substituted alkyl group; R
2
, R
3
and R
4
each independently represent hydrogen or a substituent; and X, Y and Z each independently represent a direct bond or an optionally substituted alkylene group with 1 to 3 chain members,
the process comprising carrying out esterification or transesterification in the presence of a biocatalyst.
一种生产用于制造以下一般式1所表示的抗蚀剂单体的方法:1式中,R1表示氢或可选取代的烷基;R2、R3和R4各自独立地表示氢或取代基;X、Y和Z各自独立地表示直接键或具有1至3个碳链成员的可选取代的烷基基团。该方法包括在生物催化剂存在下进行酯化或酯交换反应。