A polymer comprising recurring units containing a specific lactone ring and having an alkyl group on γ-butyrolactone skeleton of fused ring lactone and an alkyl ester substituent group intervening between the lactone structure and the polymer backbone is provided. A resist composition comprising the polymer as base resin is improved in such properties as DOF margin and MEF and quite effective for precise micropatterning.
本发明提供了一种聚合物,它由含有特定内酯环的递归单元组成,在融合环内酯的
γ-丁内酯骨架上有一个烷基,在内酯结构和聚合物骨架之间有一个烷基酯取代基。以这种聚合物为基体
树脂的抗蚀剂组合物在 DOF 余量和 MEF 等性能方面都有所改进,对精确微图案化非常有效。