A 5-methylene-1,3-dioxolan-4-one derivative and a monomer and copolymer thereof and a resist composition containing the polymer or copolymer where the 5-methylene-1,3 -dioxolan-4-one derivative is of formula (1):
wherein R1 represents a bridged cyclic hydrocarbon group containing 4 to 16 carbon atoms, or a linear or branched alkyl group containing 1 to 6 carbon atoms which has a bridged cyclic hydrocarbon group containing 4 to 16 carbon atoms as a substituent; R2 represents a hydrogen atom, or a linear or branched alkyl group containing 1 to 6 carbon atoms; or R1 and R2 represent a bridged cyclic hydrocarbon group containing 4 to 16 carbon atoms together with the carbon atom to which they are bound, provided that the alkyl group and the bridged cyclic hydrocarbon group may have at least one substituent selected from a group consisting of a linear or branched alkyl group containing 1 to 6 carbon atoms which may be optionally substituted, a hydroxy group, a carboxy group, an acyl group containing 2 to 6 carbon atoms, an alkoxy group containing 1 to 6 carbon atoms, and a carboxy group esterified with an alcohol containing 1 to 6 carbon atoms.
一种5-亚甲基-1,3-二氧杂环戊-4-酮衍
生物及其单体和共聚物,以及包含该聚合物或共聚物的抗蚀剂组合物,其中5-亚甲基-1,3-二氧杂环戊-4-酮衍
生物的式子为(1):其中R1代表含有4至16个碳原子的桥
环烃基或含有4至16个碳原子的桥
环烃基作为取代基的线性或支链烷基,其含有1至6个碳原子;R2代表氢原子或含有1至6个碳原子的线性或支链烷基;或R1和R2与它们所连接的碳原子一起表示含有4至16个碳原子的桥
环烃基,前提是烷基和桥
环烃基可以具有至少一种取代基,所述取代基选自一组由含有1至6个碳原子的线性或支链烷基(可选地被取代)、羟基、羧基、含有2至6个碳原子的酰基、含有1至6个碳原子的烷氧基和酯化有含有1至6个碳原子的醇的羧基组成的。