A positive photosensitive composition comprising (A) a compound capable of generating a fluorine-substituted alkanesulfonic acid having 2 to 4 carbon atoms by irradiation of actinic rays or radiation, (B) a resin having a monocyclic or polycyclic alicyclic hydrocarbon structure and being decomposed by the action of an acid to increase solubility in an alkali developer, (C) a basic compound, and (D) a fluorine and/or silicon surfactant.
一种正感光组合物,它包括:(A) 一种化合物,这种化合物能在放 射线或辐射的照射下生成具有 2 至 4 个碳原子的
氟代烷
磺酸;(B) 一种
树脂,这种
树脂 具有单环或多环脂
环烃结构,并能在酸的作用下分解以增加在碱显影剂中的溶解度; (C) 一种碱性化合物;(D) 一种
氟和/或
硅表面活性剂。