The reaction of α-methoxyvinyllithium with trialkylboranes
作者:Alan B. Levy、Steven J. Schwartz、Nancy Wilson、Bradley Christie
DOI:10.1016/s0022-328x(00)84870-6
日期:1978.8
Several alkenyltrialkylborate salts derived from the reaction of α-methoxyvinyllithium (MVL) with trialkylboranes have been prepared. At −80°C, the initial complex is stable as indicated by its iodination to give moderate yields of enol ethers. Warming the complex to room temperature leads via an alkyl group migration to a new alkenyldialkylmethoxyborate salt. Oxidation of this complex leads to methyl
COMPOSITION FOR FORMATION OF RESIST UNDERLAYER FILM
申请人:Sakamoto Rikimaru
公开号:US20120251955A1
公开(公告)日:2012-10-04
There is provided a composition for forming a resist underlayer film for electron beam or EUV lithography that is used in a device manufacture process using EUV lithography, reduces the adverse effects caused by an electron beam or EUV, and is effective for the formation of a good resist pattern and a resist pattern formation method using the composition for forming a resist underlayer film for lithography. A composition for forming a resist underlayer film for electron beam or EUV lithography, comprising: a polymer having a repeating unit structure of Formula (1):
[where Q is a group of Formula (2) or Formula (3):
where Q
1
is a C
1-10
alkylene group, a phenylene group, a naphthylene group, or an anthrylene group, X
1
is a group of Formula (4), Formula (5), or Formula (6):
and a solvent.