申请人:Kim Hyun-Jin
公开号:US20100266967A1
公开(公告)日:2010-10-21
A polymer for forming an organic anti-reflective coating layer, which is soluble in alkali solutions so that an additional etching process of anti-reflective coating layer is not required, and a composition including the same are disclosed. The polymer for forming an organic anti-reflective coating layer has the following formula.
Wherein, R
1
is a hydrogen atom (H) or a methyl group (—CH
3
), R
2
is a sulfur atom (S) or an oxygen atom (O), R
3
is a group containing 1 to 20 carbon atoms and a terminal hydroxyl group, R
4
is an alkylene group or a cycloalkylene group, and if necessary, a hetero atom is contained therein, and a, b and c independently represent weight % of repeating units constituting the polymer, and are 1 to 98 weight %, 1 to 98 weight %, and 1 to 98 weight %, respectively.