An efficient and commercial phosphorylation process of a complex alcohol, such as secondary and tertiary alcohols, with P4O10 at high temperatures, and a product obtained by the process.
Zerner, Comptes Rendus Hebdomadaires des Seances de l'Academie des Sciences, 1911, vol. 152, p. 1599
作者:Zerner
DOI:——
日期:——
PROCESS
申请人:Avecho Biotechnology Limited
公开号:EP3558903A1
公开(公告)日:2019-10-30
MONOMER FOR FORMING ORGANIC ANTI-REFLECTIVE COATING LAYER, POLYMER THEREOF AND COMPOSITION INCLUDING THE SAME
申请人:KIM Sang-Jeoung
公开号:US20080131815A1
公开(公告)日:2008-06-05
A monomer for forming an organic anti-reflective coating layer, a polymer thereof and a composition including the same are disclosed. In a photolithography process, the organic anti-reflective coating layer absorbs an exposed light between a layer to be etched and a photoresist layer, and prevents a photoresist pattern from collapsing due to a standing wave generated under the photoresist layer. The polymer for forming an organic anti-reflective coating layer includes a repeating unit represented by Formula
wherein, R
1
is a hydrogen atom, a methyl group or an ethyl group, R
2
is a C
1
˜C
20
alkylene group, a C
3
˜C
20
cycloalkylene group or a C
6
˜C
20
aromatic hydrocarbon group, POSS is a polyhedral-oligomeric-silsesquioxane, and m is an integer of 2 to 110.
POLYMER FOR FORMING ORGANIC ANTI-REFLECTIVE COATING LAYER
申请人:Kim Hyun-Jin
公开号:US20100266967A1
公开(公告)日:2010-10-21
A polymer for forming an organic anti-reflective coating layer, which is soluble in alkali solutions so that an additional etching process of anti-reflective coating layer is not required, and a composition including the same are disclosed. The polymer for forming an organic anti-reflective coating layer has the following formula.
Wherein, R
1
is a hydrogen atom (H) or a methyl group (—CH
3
), R
2
is a sulfur atom (S) or an oxygen atom (O), R
3
is a group containing 1 to 20 carbon atoms and a terminal hydroxyl group, R
4
is an alkylene group or a cycloalkylene group, and if necessary, a hetero atom is contained therein, and a, b and c independently represent weight % of repeating units constituting the polymer, and are 1 to 98 weight %, 1 to 98 weight %, and 1 to 98 weight %, respectively.