A series of N-[chloro(diorganyl)silyl]anilines RR'Si(NRaEuro(3)Ph)Cl (R, R' = Me, Ph, CH2=CH, ClCH2, Cl(CH2)(3); RaEuro(3) = H, Me) was prepared via the reaction of diorganyldichlorosilanes with aniline or N-ethylaniline in the presence of triethylamine.