A method of manufacturing polymer-coated particles is useful for chemical mechanical polishing magnetic, optical, semiconductor or silicon substrates. First it provides a dispersion of particle cores in a non-aqueous solvent. Then introducing a polymeric precursor into the dispersion to react the polymeric precursor forms a polymer. The polymer coats at least a portion of the surface of the particle cores with the polymer and forms the polymer-coated particles having a solid outer polymeric shell. Substituting the non-aqueous solvent with water forms an aqueous mixture containing the polymer-coated particles. And it forms an aqueous chemical mechanical polishing formulation with the polymer-coated particles without drying the polymer-coated particles.
                            一种制造聚合物涂层颗粒的方法可用于磁性、光学、半导体或
硅基底的
化学机械抛光。首先,它将颗粒核心分散在非
水溶剂中。然后将聚合物前体引入分散液中,使聚合物前体发生反应形成聚合物。聚合物至少会在颗粒核心的部分表面包覆一层聚合物,形成具有固体聚合物外壳的聚合物包覆颗粒。用
水代替非
水性溶剂,形成含有聚合物涂层颗粒的
水性混合物。在不干燥聚合物涂层颗粒的情况下,形成含有聚合物涂层颗粒的
水性
化学机械抛光配方。