New monomers, norbornenylmethyl fluoroalkyl ethers, made by reaction of bicyclo(2,2,1)hept-5-ene-2-methanol with fluoro(alkyl vinyl ethers), are described. These monomers are useful in making polymers such as hydrophobic, hydrolytically-resistant polymers for photoresists, particularly for use in photoimaging by immersion lithography with 193 nm light.
描述了通过将双环(2,2,1)庚-5-烯-2-
甲醇与
氟(烷基
乙烯醚)反应制备的新单体,即新的莫诺烯基甲基氟烷基醚。这些单体在制备聚合物方面非常有用,例如用于光阻剂的疏
水、耐
水解性聚合物,特别适用于使用193纳米光进行浸没光刻的光刻影像技术。