申请人:Shin-Etsu Chemical Co., Ltd.
公开号:US10915021B2
公开(公告)日:2021-02-09
A monomer having formula (A) is provided. RA is H, methyl or trifluoromethyl, X1 is a single bond, ether, ester or amide bond, Ra is a C1-C20 monovalent hydrocarbon group, Rb is H or an acid labile group, X is halogen, n is an integer of 1 to 4, m is an integer of 0 to 3, and 1≤n+m≤4. A resist composition comprising a polymer derived from the monomer has a high sensitivity to high-energy radiation, especially EUV.
提供一种具有式(A)的单体。其中 RA 是 H、甲基或三氟甲基,X1 是单键、醚键、酯键或酰胺键,Ra 是 C1-C20 单价烃基,Rb 是 H 或可酸基,X 是卤素,n 是 1 到 4 的整数,m 是 0 到 3 的整数,1≤n+m≤4。包含由单体衍生的聚合物的抗蚀剂组合物对高能辐射(尤其是紫外线)具有高灵敏度。