A method for controlling the chemical composition of an electroplating bath solution used to plate a plurality of substrates by providing the electroplating bath solution to a small-volume plating cell configured to minimize additive breakdown, and discarding the electroplating bath after a predetermined bath lifetime. The method includes predetermining a lifetime of an electroplating bath solution having a desired chemical composition, combining a plurality of electroplating bath solution components thereby forming the electroplating bath solution having the desired chemical composition, filling a small-volume plating cell with the electroplating bath solution, plating a plurality of substrates in the electroplating bath solution until the bath lifetime is reached; and discarding the electroplating bath solution after the bath lifetime is reached.
一种控制电镀槽溶液
化学成分的方法,用于对多个基底进行电镀,方法是将电镀槽溶液提供给一个小容量电镀池,该电镀池的配置可最大限度地减少添加剂的分解,并在预定的电镀槽寿命之后丢弃电镀槽。该方法包括预先确定具有所需
化学成分的电镀槽溶液的寿命,组合多种电镀槽溶液成分从而形成具有所需
化学成分的电镀槽溶液,用电镀槽溶液填充小容量电镀池,在电镀槽溶液中电镀多种基底,直到达到电镀槽寿命;以及在达到电镀槽寿命后丢弃电镀槽溶液。