申请人:SUMITOMO CHEMICAL COMPANY, LIMITED
公开号:US10564544B2
公开(公告)日:2020-02-18
A photoresist composition comprising an acid generator and a resin which comprises one or more structural units (a1) derived from a monomer (a1) having an acid-liable group, all of monomers (a1) showing a distance of Hansen solubility parameters between the monomer (a1) and butyl acetate in the range of 3 to 5, the distance being calculated from formula (1):
R=(4×(δdm−15.8)2+(δpm−3.7)2+(δhm−6.3)2)1/2 (1)
in which δdm represents a dispersion parameter of a monomer, δpm represents a polarity parameter of a monomer, δhm represents a hydrogen bonding parameter of a monomer, and R represents a distance of Hansen solubility parameters, and at least one of the monomers (a1) showing a difference of R between the monomer (a1) and a compound in which an acid is removed from the monomer (a1) in the range of not less than 5.
一种光致抗蚀剂组合物,包括一种酸发生器和一种树脂,该树脂由一个或多个结构单元(a1)组成,这些结构单元(a1)由具有酸性基团的单体(a1)衍生而来,所有单体(a1)与乙酸丁酯之间的汉森溶解度参数距离在 3 至 5 之间,该距离由式(1)计算得出:
R=(4×(δdm-15.8)2+(δpm-3.7)2+(δhm-6.3)2)1/2 (1)
其中,δdm 代表单体的分散参数,δpm 代表单体的极性参数,δhm 代表单体的氢键参数,R 代表汉森溶解度参数的距离,单体(a1)中至少有一种单体(a1)与从单体(a1)中除去一种酸的化合物之间的 R 差的范围不小于 5。