Novel ester compounds having alicyclic structure and method for preparing same
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:US20010051742A1
公开(公告)日:2001-12-13
Ester compounds of formula (1) are useful as monomers to form base resins for use in chemically amplified resist compositions adapted for micropatterning lithography.
1
R
1
is H or C
1-6
alkyl, R
2
is an unsubstituted or halo-substituted acyl or alkoxycarbonyl group of 1-15 carbon atoms, R
3
is an acid labile group, k is 0 or 1, and m is an integer from 0 to 5.
Ester compounds having alicyclic structure and method for preparing same
申请人:Shin-Etsu Chemical, Co., Ltd.
公开号:US06403822B2
公开(公告)日:2002-06-11
Ester compounds of formula (1) are useful as monomers to form base resins for use in chemically amplified resist compositions adapted for micropatterning lithography.
R1 is H or C1-6 alkyl, R2 is an acid labile group, k is 0 or 1, and m is an integer from 0 to 5.
Ester compounds having alicyclic structure, and methods for preparing the same
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:EP1149826A2
公开(公告)日:2001-10-31
Ester compounds of formula (1) are useful as monomers to form base resins for use in chemically amplified resist compositions adapted for micropatterning lithography.
R1 is H or C1-6 alkyl, R2 is an unsubstituted or halo-substituted acyl or alkoxycarbonyl group of 1-15 carbon atoms, R3 is an acid labile group, k is 0 or 1, and m is an integer from 0 to 5.