易于制备的锡烷1在标准的自由基反应中的行为与常规试剂Bu3SnH和Ph3SnH相似,但具有的特殊特征是,通过温和水解(LiOH-水-THF)可轻松且大量去除含锡副产物或TsOH-水-THF),将其转化为碱溶性(NaHCO3水溶液)。在一系列涉及卤化物,硒化物,Barton-McCombie脱氧和烯炔环化的自由基反应中,评估了锡烷1的性能。在一些情况下,通过1 H NMR监测后处理程序在去除锡中的有效性。
RADIATION-SENSITIVE RESIN COMPOSITION, METHOD FOR FORMING A RESIST PATTERN, COMPOUND, AND POLYMER
申请人:ASANO Yuusuke
公开号:US20120156612A1
公开(公告)日:2012-06-21
A radiation-sensitive resin composition includes a first polymer that includes a repeating unit having an acid-labile group and becomes alkali-soluble upon dissociation of the acid-labile group, and a radiation-sensitive acid-generating agent. The acid-labile group has a structure shown by a general formula (1). R
1
represents a methyl group or the like, R
2
represents a hydrocarbon group that forms a cyclic structure, R
3
represents a fluorine atom or the like, R
4
represents a carbon atom, and n
1
is an integer from 1 to 7.
RADIATION-SENSITIVE RESIN COMPOSITION, METHOD FOR FORMING RESIST PATTERN, POLYMER AND POLYMERIZABLE COMPOUND
申请人:ASANO Yuusuke
公开号:US20120237875A1
公开(公告)日:2012-09-20
A radiation-sensitive resin composition includes a first polymer including an acid-labile group, an acid generator to generate an acid upon exposure to radiation, and a second polymer including a fluorine atom and a functional group shown by a general formula (x). The second polymer has a fluorine atom content higher than a fluorine atom content of the first polymer. R
1
represents an alkali-labile group. A represents an oxygen atom, —NR′—, —CO—O—
#
or —SO
2
—O—
##
, wherein the oxygen atom represented by A is not an oxygen atom bonded directly to an aromatic ring, a carbonyl group, or a sulfoxyl group, R′ represents a hydrogen atom or an alkali-labile group, and “#” and “##” indicates a bonding hand bonded to R
1
.
-A-R
1
(x)
PHOTORESIST COMPOSITION, RESIST-PATTERN FORMING METHOD, POLYMER, AND COMPOUND
申请人:SATO Mitsuo
公开号:US20120258402A1
公开(公告)日:2012-10-11
A photoresist composition includes a polymer that includes a structural unit shown by the following formula (1), and a photoacid generator. R
1
in the formula (1) represents a hydrogen atom, a fluorine atom, a methyl group, or a trifluoromethyl group, Z represents a group that forms a divalent alicyclic group having 3 to 20 carbon atoms together with a carbon atom bonded to X, X represents an alkanediyl group having 1 to 6 carbon atoms, Y represents a hydrogen atom or —CR
2
R
3
(OR
4
), and R
2
to R
4
independently represent a hydrogen atom or a monovalent hydrocarbon group, provided that R
3
and R
4
optionally bond to each other to form a cyclic ether structure together with a carbon atom bonded to R
3
and an oxygen atom bonded to R
4
.
RADIATION SENSITIVE RESIN COMPOSITION, METHOD FOR FORMING A PATTERN, POLYMER AND COMPOUND
申请人:Kimoto Takakazu
公开号:US20120276482A1
公开(公告)日:2012-11-01
A radiation sensitive resin composition includes a first polymer having a group represented by a following formula (1), and a radiation sensitive acid generator. n is an integer of 2 to 4. X represents a single bond or a bivalent organic group. A represents a (n+1) valent linking group. Each Q independently represents a group that includes an alkali-dissociable group.
RADIATION-SENSITIVE RESIN COMPOSITION, METHOD FOR FORMING RESIST PATTERN, AND POLYMER AND COMPOUND
申请人:Osaki Hitoshi
公开号:US20130122426A1
公开(公告)日:2013-05-16
A radiation-sensitive resin composition that provides a resist coating film in a liquid immersion lithography process is provided, the radiation-sensitive resin composition being capable of exhibiting a great dynamic contact angle during exposure, whereby the surface of the resist coating film can exhibit a superior water draining property, and the radiation-sensitive resin composition being capable of leading to a significant decrease in the dynamic contact angle during development, whereby generation of development defects can be inhibited, and further shortening of a time period required for change in a dynamic contact angle is enabled. A radiation-sensitive resin composition including (A) a fluorine-containing polymer having a structural unit (I) that includes a group represented by the following formula (1), and (B) a radiation-sensitive acid generator.