Liquid composition containing aminoether for deposition of metal-containing films
申请人:Ivanov Sergei Vladimirovich
公开号:US08507704B2
公开(公告)日:2013-08-13
A formulation, comprising: a) at least one metal-ligand complex, wherein one or more ligands are selected from the group consisting of β-diketonates, β-ketoiminates, β-ketoesterates, β-diiminates, alkyls, carbonyls, alkyl carbonyls, cyclopentadienyls, pyrrolyls, alkoxides, amidinates, imidazolyls, and mixtures thereof; and the metal is selected from Group 2 to 16 elements of the Periodic Table of the Elements; and, b) at least one aminoether selected from the group consisting of R1R2NR3OR4NR5R6, R1OR4NR5R6, O(CH2CH2)2NR1, R1R2NR3N(CH2CH2)2O, R1R2NR3OR4N(CH2CH2)2O, O(CH2CH2)2NR1OR2N(CH2CH2)2O, and mixtures thereof, wherein R1-6 are independently selected from group consisting of C1-10 linear alkyl, C1-10 branched alkyl, C1-10 cyclic alkyl, C6-C10 aromatic, C1-10 alkylamine, C1-10 alkylaminoalkyl, C1-10 ether, C4-C10 cyclic ether, C4-C10 cyclic aminoether, and mixture thereof.
一种配方,包括:a)至少一种金属配体复合物,其中一个或多个配体选择自β-二酮,β-酮亚胺,β-酮酸酯,β-二胺,烷基,羰基,烷基羰基,环戊二烯基,吡咯基,烷氧基,酰胺基,咪唑基和其混合物的群组;金属选择自元素周期表的第2到第16组元素;并且,b)至少一种氨基醚,选择自R1R2NR3OR4NR5R6,R1OR4NR5R6,O(CH2CH2)2NR1,R1R2NR3N(CH2CH2)2O,R1R2NR3OR4N(CH2CH2)2O,O(CH2CH2)2NR1OR2N(CH2CH2)2O和其混合物的群组,其中R1-6独立地选择自C1-10线性烷基,C1-10支链烷基,C1-10环烷基,C6-C10芳香族,C1-10烷基胺,C1-10烷基氨基烷,C1-10醚,C4-C10环醚,C4-C10环氨基醚和其混合物的群组。