Group 2 Metal Precursors For Deposition Of Group 2 Metal Oxide Films
申请人:Lei Xinjian
公开号:US20100119726A1
公开(公告)日:2010-05-13
This invention is related to Group 2 metal-containing polydentate β-ketoiminate precursors and compositions comprising Group 2 metal-containing polydentate β-ketoiminate precursors, wherein the polydentate β-ketoiminate precursors incorporate an alkoxy group in the imino portion of the molecule. The compounds and compositions are useful for fabricating metal containing films on substrates such as silicon, metal nitride, metal oxide and other metal layers via chemical vapor deposition (CVD) processes.