In this study, the heterogeneously catalyzed alkoxycarbonylation of olefins with CO2 based on a supported ionic-liquid-phase (SILP) strategy is reported for the first time. An [Ru]@SILP catalyst was accessed by immobilization of ruthenium complex on a SILP, wherein imidazolium chloride was chemically integrated at the surface or in the channels of the silica gel support. An active Ru site was generated
POLYMERIZABLE ANION-CONTAINING SULFONIUM SALT AND POLYMER, RESIST COMPOSITION, AND PATTERNING PROCESS
申请人:OHASHI Masaki
公开号:US20100099042A1
公开(公告)日:2010-04-22
A polymerizable anion-containing sulfonium salt having formula (1) is provided wherein R
1
is H, F, methyl or trifluoromethyl, R
2
, R
3
and R
4
are C
1
-C
10
alkyl, alkenyl or oxoalkyl or C
6
-C
18
aryl, aralkyl or aryloxoalkyl, or two of R
2
, R
3
and R
4
may bond together to form a ring with S, A is a C
2
-C
20
hydrocarbon group having cyclic structure, and n is 0 or 1. The sulfonium salt generates a very strong sulfonic acid upon exposure to high-energy radiation. A resist composition comprising a polymer derived from the sulfonium salt is also provided.
SULFONIUM SALT, ACID GENERATOR, RESIST COMPOSITION, PHOTOMASK BLANK, AND PATTERNING PROCESS
申请人:OHASHI Masaki
公开号:US20100143830A1
公开(公告)日:2010-06-10
A sulfonium salt has formula (1) wherein R
1
is a monovalent hydrocarbon group except vinyl and isopropenyl, R
2
, R
3
, and R
4
are alkyl, alkenyl, oxoalkyl, aryl, aralkyl or aryloxoalkyl or may bond together to form a ring with the sulfur atom, and n is 1 to 3. A chemically amplified resist composition comprising the sulfonium salt is capable of forming a fine feature pattern of good profile after development due to high resolution, improved focal latitude, and minimized line width variation and profile degradation upon prolonged PED.
A highly water-dispersible/magnetically separable palladium catalyst based on a Fe3O4@SiO2 anchored TEG-imidazolium ionic liquid for the Suzuki–Miyaura coupling reaction in water
作者:Babak Karimi、Fariborz Mansouri、Hojatollah Vali
DOI:10.1039/c3gc42311e
日期:——
A novelionicliquidfunctionalizedmagnetic nanoparticle was prepared by anchoring an imidazolium ionicliquid bearing triethylene glycol moieties on the surface of silica-coated iron oxide nanoparticles. The material proved to be an effective host for the immobilization of a Pd catalyst through a subsequent simple ion-exchange process giving a highly water dispersible, active and yet magnetically
Highly efficient synthesis of cyclic carbonates from epoxides catalyzed by salen aluminum complexes with built-in “CO<sub>2</sub> capture” capability under mild conditions
作者:Rongchang Luo、Xiantai Zhou、Shaoyun Chen、Yang Li、Lei Zhou、Hongbing Ji
DOI:10.1039/c3gc42388c
日期:——
A polyether-based imidazolium ionic liquid functionalized salen Al complex displays high efficiency and reusability as a homogeneous, single-component and multi-functional catalyst for the cycloaddition of CO2 to epoxides under mild conditions.