Aqueous copper plating baths and a method for deposition of copper or copper alloy onto a substrate
申请人:Atotech Deutschland GmbH
公开号:US10767275B2
公开(公告)日:2020-09-08
The present invention relates to bisurea derivatives and their use in aqueous plating baths for copper and copper alloy deposition in the manufacture of printed circuit boards, IC substrates, semiconducting and glass devices for electronic applications. The plating bath according to the present invention comprises at least one source of copper ions and a bisurea derivative. The plating bath is particularly useful for filling recessed structures with copper and build-up of pillar bump structures.
本发明涉及双酮酰胺衍生物及其在水性电镀液中的应用,该电镀液用于铜和铜合金的沉积,可用于制造印刷电路板、集成电路基板、半导体和玻璃电子设备。根据本发明,电镀液中至少包含一种铜离子源和一种比索拉衍生物。该电镀液特别适用于用铜填充凹陷结构和柱状凸起结构的形成。