A surface treatment composition according to the present invention is used for treating a surface of a polished object to be polished which is obtained after polishing with a polishing composition including ceria, using the surface treatment composition including a (co)polymer having a monomer-derived structural unit having a carboxyl group or a salt group thereof, a residue removing accelerator composed of a specific compound having a hydroxyl group, and a dispersing medium, wherein pH is less than 7.
根据本发明的一种表面处理组合物用于处理用包括
铈的抛光组合物抛光后得到的待抛光物体的表面,使用的表面处理组合物包括具有羧基或盐基的单体衍生结构单元的(共)聚合物、由具有羟基的特定化合物组成的残留物去除
促进剂和分散介质,其中 pH 值小于 7。