申请人:Kawaguchi Yasuhide
公开号:US20050202345A1
公开(公告)日:2005-09-15
A resist composition which can easily form a resist pattern excellent in transparency for vacuum ultraviolet rays such as an F
2
excimer laser or the like and dry etching characteristics and further excellent in sensitivity, resolution, flatness, thermal resistance and the like, is provided. The resist composition, characterized by comprising (A) a fluorine-containing polymer having an acidic group blocked with a blocking group containing a cycloalkyl group, an organic group having one or more of cycloalkyl groups, a bicycloalkyl group or the like, (B) an acid generating compound capable of generating an acid by irradiation with a light, and (C) an organic solvent.
提供了一种抗蚀性组合物,该组合物可以轻松形成透明度优异的抗真空紫外线(例如F2准分子激光器)或干法刻蚀特性,并且在灵敏度、分辨率、平整度、耐热性等方面也具有优异的抗蚀性图案。该抗蚀性组合物的特征在于包含(A)一种含有具有环烷基、一个或多个环烷基或双环烷基等有机基团的阻断基的酸性基团的氟含量高的聚合物,(B)一种能够通过光辐射产生酸的酸发生化合物,以及(C)一种有机溶剂。