申请人:Hyundai Electronics Industries Co., Ltd.
公开号:US06265130B1
公开(公告)日:2001-07-24
The present invention relates to a carboxyl-containing alicyclic compound represented by Chemical Formula 1:
wherein, R1 and R2, which may be identical to or different from each other, represent hydrogen or a tert-butyl group; X represents hydrogen, hydroxy or oxygen; and n represents a number from 1 to 3. Compounds of the present invention are useful as monomers in a photoresist resin, and in a process for preparing the same.
本发明涉及一种含羧基的脂环化合物,其化学式表示为1:其中,R1和R2可以相同或不同,表示氢或叔丁基;X表示氢、羟基或氧;n表示1至3的数字。本发明的化合物在光刻胶树脂中可用作单体,并且在制备过程中也很有用。