A positive resist composition based on a polymer comprising recurring units (a) of (meth)acrylate having an iodized lactone ring, and recurring units (b1) having a carboxyl group substituted with an acid labile group and/or recurring units (b2) having a phenolic hydroxyl group substituted with an acid labile group has a high sensitivity and resolution, and forms a pattern of good profile and minimal edge roughness after exposure.
基于聚合物的正性光阻组合物,其中聚合物包含具有
碘化内酯环的(meth)
丙烯酸酯重复单元(a),以及具有酸敏感基团取代的羧基官能团的重复单元(b1)和/或具有酸敏感基团取代的
酚羟基官能团的重复单元(b2),具有高灵敏度和分辨率,并在曝光后形成具有良好轮廓和最小边缘粗糙度的图案。