申请人:SUMITOMO CHEMICAL COMPANY, LIMITED
公开号:US20220011668A1
公开(公告)日:2022-01-13
A salt represented by formula (I), an acid generator and a resist composition:
wherein R
1
, R
2
and R
3
each represent a hydroxy group, —O—R
10
, —O—CO—O—R
10
, —O-L
1
-CO—O—R
10
; R
4
, R
5
, R
6
, R
7
, R
8
and R
9
each represent a halogen atom, a hydroxy group, etc.; L
1
represents an alkanediyl group; R
10
represents an acid-labile group; X
1
, X
2
and X
3
each represent an oxygen atom or a sulfur atom; m1 and m7 represent an integer of 0 to 5, m2 to m6 and m8, m9 represent an integer of 0 to 4, in which 0≤m1+m7≤5, 0≤m2+m8≤4, 0≤m3+m9≤4, and at least one of m1, m2 and m3 represents an integer of 1 or more; X
4
represents a single bond, —CH
2
—, —O—, —S—, etc.; and AI
−
represents an organic anion.
公式(I)表示的盐、酸发生剂和抗蚀组合物:其中R1、R2和R3分别表示羟基、—O—R10、—O—CO—O—R10、—O-L1-CO—O—R10;R4、R5、R6、R7、R8和R9分别表示卤素原子、羟基等;L1表示脂肪二烷基基团;R10表示酸敏感基团;X1、X2和X3分别表示氧原子或硫原子;m1和m7表示0到5的整数,m2到m6和m8、m9表示0到4的整数,其中0≤m1+m7≤5,0≤m2+m8≤4,0≤m3+m9≤4,并且m1、m2和m3中至少有一个表示1或更多的整数;X4表示单键,—CH2—,—O—,—S—等;AI-表示有机阴离子。