The present invention provides a silicone skeleton-containing polymer compound containing a repeating unit shown by the general formula (1). There can be provided a silicone skeleton-containing polymer compound suitable used as a base resin of a chemically amplified negative resist composition that can remedy the problem of delamination generated on a metal wiring such as Cu and Al, an electrode, and a substrate, especially on a substrate such as SiN, and can form a fine pattern without generating a scum and a footing profile in the pattern bottom and on the substrate.
本发明提供了一种含有
硅骨架的聚合物化合物,其含有由通式(1)所示的重复单元。可以提供一种适用于
化学增强负型光阻组合物的基础
树脂的含有
硅骨架的聚合物化合物,可以解决在
金属布线(如Cu和Al)、电极和基板(特别是在SiN基板上)上产生的剥离问题,并且可以在图案底部和基板上不产生污点和足底轮廓的情况下形成细小的图案。