申请人:Toray Industries, Inc.
公开号:EP2110708A1
公开(公告)日:2009-10-21
[Problem] To provide a positive-type photosensitive resin composition that is produced with novolac resin and has good mechanical properties and high storage stability.
[Means for Solving the Problem] A positive-type photosensitive resin composition, comprising:
(a) a novolac resin;
(b) a polymer comprising, as a main component, a structure represented by formula (1) below and/or a structure represented by formula (2) below:
(wherein formulae (1) and (2), R1 and R2 may be the same or different and each represent an organic group having at least two carbon atoms and a valence of 2 to 8, R3 and R4 may be the same or different and each represent hydrogen or a monovalent organic group of 1 to 20 carbon atoms, -NH-R5 in formula (1) and -CO-R6 in formula (2) each represent a polymer end group, R5 and R6 each represent a monovalent organic group having 2 to 30 carbon atoms which includes an unsaturated hydrocarbon group, n is in the range of 10 to 100,000, 1 and m each represent an integer of 0 to 2, and p and q each represent an integer of 0 to 4, provided that p + q > 0;
(c) a quinone diazide compound;
(d) an alkoxymethyl group-containing compound; and
(e) a solvent.
[问题] 提供一种用酚醛树脂生产的正型感光树脂组合物,该组合物具有良好的机械性能和较高的贮存稳定性。
[解决问题的方法] 一种正型感光树脂组合物,包括
(a) 酚醛树脂;
(b) 聚合物,其主要成分包括下式 (1) 所代表的结构和/或下式 (2) 所代表的结构:
(式(1)和(2)中,R1 和 R2 可以相同或不同,各自代表至少有两个碳原子且价数为 2 至 8 的有机基团,R3 和 R4 可以相同或不同,各自代表氢或 1 至 20 个碳原子的一价有机基团、式(1)中的-NH-R5 和式(2)中的-CO-R6 各自代表聚合物端基,R5 和 R6 各自代表具有 2 至 30 个碳原子的一价有机基团,其中包括不饱和烃基,n 在 10 至 100,000 之间,1 和 m 各自代表 0 至 2 的整数,p 和 q 各自代表 0 至 4 的整数,条件是 p + q > 0;
(c) 重氮化醌化合物;
(d) 含烷氧基甲基的化合物;以及
(e) 溶剂。