申请人:MASUYAMA Tatsuro
公开号:US20100021847A1
公开(公告)日:2010-01-28
An oxime compound represented by the formula (I):
wherein Y represents an unsubstituted or substituted n-valent C6-C14 aromatic hydrocarbon group, n represents an integer of 1 to 6, R
1
) represents a C1-C30 aliphatic hydrocarbon group etc., R
2
represents a linear or branched chain C1-C20 aliphatic hydrocarbon group etc., W represents —CO—O— etc., Q
1
and Q
2
each independently represent a fluorine atom etc., Z represents a C1-C20 halogenated aliphatic hydrocarbon group etc, and the resist composition containing the same.