申请人:——
公开号:US20020009668A1
公开(公告)日:2002-01-24
A radiation-sensitive resin composition comprising an acid-labile group-containing resin and a photoacid generator is disclosed. The resin has a structure of the formula (1),
1
wherein R
1
represents a hydrogen atom, a monovalent acid-labile group, an alkyl group having 1-6 carbon atoms which does not have an acid-labile group, or an alkylcarbonyl group having 2-7 carbon atoms which does not have an acid-labile group, X
1
represents a linear or branched fluorinated alkyl group having 1-4 carbon atoms, and R
2
represents a hydrogen atom, a linear or branched alkyl group having 1-10 carbon atoms, or a linear or branched fluorinated alkyl group having 1-10 carbon atoms. The resin composition exhibits high transmittance of radiation, high sensitivity, resolution, and pattern shape, and is useful as a chemically amplified resist in producing semiconductors at a high yield.
公开了一种辐射敏感的树脂组合物,包括一个含有酸敏感基团的树脂和一个光酸发生剂。该树脂的结构式为(1),其中R1代表氢原子、一价酸敏感基团、不含酸敏感基团的1-6个碳原子的烷基或不含酸敏感基团的2-7个碳原子的烷基酰基,X1代表线性或支链的含有1-4个碳原子的氟化烷基,R2代表氢原子、含有1-10个碳原子的线性或支链烷基,或含有1-10个碳原子的线性或支链氟化烷基。该树脂组合物表现出辐射的高透过率、高敏感度、分辨率和图案形状,可用于在高产率下生产半导体中的化学放大图案。