Ferroelectric and reliability properties of metal-organic chemical vapor deposited Pb(Zr0.15Ti0.85)O3 thin films grown in the self-regulation process window
作者:Jin Shi Zhao、Hyun Ju Lee、Joon Seop Sim、Keun Lee、Cheol Seong Hwang
DOI:10.1063/1.2198487
日期:2006.4.24
Ferroelectric reliability of Pb(Zr0.15Ti0.85)O3 films grown by metal-organic chemical vapor deposition at 570°C on an Ir electrode in the self-regulation process window [constant Pb concentration irrespective of the precursor input ratio (Pb∕(Zr+Ti), PIR)] was studied. Although the Pb composition and crystallinity of the films grown under different PIR were almost identical, the film grown under a
在自调节工艺窗口中,通过金属有机化学气相沉积在 570°C 下在 Ir 电极上生长的 Pb(Zr0.15Ti0.85)O3 薄膜的铁电可靠性[恒定 Pb 浓度与前驱体输入比 (Pb∕( Zr+Ti)、PIR)]进行了研究。尽管在不同 PIR 下生长的薄膜的 Pb 成分和结晶度几乎相同,但在靠近工艺窗口中心的 PIR 下生长的薄膜表现出最好的铁电性能。X 射线光电子能谱表明,在较低和较高 PIR 下生长的薄膜分别具有残留的 ZrO2 和金属 Pb,这导致剩余极化和可靠性降低。