申请人:Shin-Etsu Chemical Co., Ltd.
公开号:US20170299963A1
公开(公告)日:2017-10-19
A monomer having an onium salt structure represented by formula (1) gives a polymer which is fully compatible with resist components. A resist composition comprising the polymer has advantages including reduced acid diffusion, high sensitivity, high resolution, a good balance of lithography properties, and less defects, and is quite effective for precise micropatterning.
具有公式(1)所表示的onium盐结构的单体会产生与抗蚀剂组分完全兼容的聚合物。包括该聚合物的抗蚀剂组合物具有降低酸扩散、高灵敏度、高分辨率、良好的光刻特性平衡以及较少的缺陷等优点,对于精确微图案制备非常有效。