PROCESS FOR PRODUCING ALKOXYCARBONYLFLUOROALKANESULFONATES
申请人:FUJIWARA Masaki
公开号:US20080108846A1
公开(公告)日:2008-05-08
A process for producing an alkoxycarbonylfluoroalkanesulfonate represented by the formula [1] is provided. This process includes the steps of (a) reacting a halofluoroalkanoate represented by the formula [2], with a sulfinating agent, thereby obtaining an alkoxycarbonylfluoroalkanesulfinate represented by the formula [3]; and (b) reacting the alkoxycarbonylfluoroalkanesulfinate with an oxidizing agent, thereby obtaining the target alkoxycarbonylfluoroalkanesulfonate. Furthermore, it is possible to react the obtained alkoxycarbonylfluoroalkanesulfonate with a monovalent onium salt to conduct a salt exchange, thereby obtaining a alkoxycarbonylfluoroalkanesulfonic acid onium salt represented by the formula [4].
Salt suitable for an acid generator and a chemically amplified resist composition containing the same
申请人:Yamaguchi Satoshi
公开号:US20070122750A1
公开(公告)日:2007-05-31
The present invention provides a salt of the formula (I):
wherein ring X represents monocyclic or polycyclic hydrocarbon group having 3 to 30 carbon atoms, and one or more hydrogen atom in the monocyclic or polycyclic hydrocarbon group is optionally substituted with alkyl group having 1 to 10 carbon atom, alkoxy group having 1 to 10 carbon atom, perfluoroalkyl group having 1 to 4 carbon atoms, hydroxyalkyl group having 1 to 10 carbon atoms or cyano group; Q
1
and Q
2
each independently represent fluorine atom or perfluoroalkyl group having 1 to 6 carbon atoms; and A
+
represents organic counter ion.
The present invention also provides a chemically amplified resist composition comprising the salt of the formula (I).
SALT AND PHOTORESIST COMPOSITION CONTAINING THE SAME
申请人:Ichikawa Koji
公开号:US20110014566A1
公开(公告)日:2011-01-20
A salt represented by the formula (I-Pa):
wherein X
pa
represents a single bond or a C1-C4 alkylene group,
R
pa
represents a single bond, a C4-C36 divalent alicyclic hydrocarbon group or a C6-C36 divalent aromatic hydrocarbon group, and one or more methylene groups in the divalent alicyclic hydrocarbon group can be replaced by —O— or —CO—,
Y
pa
represents a polymerizable group, and
Z
pa+
represents an organic cation.
Ammonium Fluoroalkanesulfonates and a Synthesis Method Therefor
申请人:Nagamori Masashi
公开号:US20120004447A1
公开(公告)日:2012-01-05
An ammonium hydroxyfluoroalkanesulfinate is obtained by using an organic base while sulfinating a bromofluoroalcohol with a sulfinating agent. An ammonium hydroxyfluoroalkanesulfonate is obtained by oxidizing the ammonium hydroxyfluoroalkanesulfinate. An onium fluoroalkanesulfonate is obtained by converting the ammonium hydroxyfluoroalkanesulfonate into an onium salt through esterification. This onium fluoroalkanesulfonate is useful as a photoacid generator in chemically amplified resists and the like.
Novel sulfonyldiazomethanes, photoacid generators, resist compositions, and patterning process
申请人:——
公开号:US20040167322A1
公开(公告)日:2004-08-26
A chemical amplification type resist composition comprising a specific benzenesulfonyldiazomethane containing a long-chain alkoxyl group at the 2-position on benzene ring has many advantages including improved resolution, improved focus latitude, minimized line width variation or shape degradation even on long-term PED, minimized debris left after coating, development and peeling, and improved pattern profile after development and is thus suited for microfabrication.