申请人:OCG MICROELECTRONIC MATERIALS, INC.
公开号:EP0697632A2
公开(公告)日:1996-02-21
A chemically amplified-type radiation-sensitive composition comprising:
(a) an alkali-soluble binder resin made by a condensation reaction of:
(i) hydroxystyrene moiety having formula [1] or [2]:
wherein x is an integer from 2 to 300; with
(ii) a monomethylolated phenolic compound having a formula [8]:
wherein R₁ and R₂ are individually selected from the group consisting of lower alkyl group having 1-4 carbon atoms, lower alkoxy group having 1-4 carbon atoms, amino group, and carboxylic acid group;
wherein R₃ and R₄ are individually selected from the group consisting of hydrogen, lower alkyl group having 1-4 carbon atoms, lower alkoxy groups having 1-4 carbon atoms, an amino group, and a carboxylic group; and wherein a mole ratio of the hydroxy- styrene moiety to the monomethylolated phenolic compound is from about 1:10 to about 10:1;
(b) at least one alkaline dissolution inhibitor containing acid-cleavable groups; and
(c) at least one compound that results in generation of an acidic moiety under irradiation.
一种化学放大型辐射敏感组合物,包括
(a) 一种碱溶性粘合剂树脂,由下列物质通过缩合反应制成
(i) 具有式[1]或[2]的羟基苯乙烯分子:
其中 x 为 2 至 300 的整数;与
(ii) 式[8]的单甲醇化酚类化合物:
其中 R₁ 和 R₂ 各自选自由 1-4 个碳原子的低级烷基、1-4 个碳原子的低级烷氧基、氨基和羧酸基组成的组;
其中 R₃ 和 R₄ 单独选自由氢、1-4 个碳原子的低级烷基、1-4 个碳原子的低级烷氧基、氨基和羧基组成的组;以及羟基苯乙烯分子与单甲醇化酚类化合物的摩尔比为约 1:10 至约 10:1;
(b) 至少一种含有可酸解基团的碱性溶解抑制剂;以及
(c) 至少一种能在辐照下产生酸性分子的化合物。