The present invention provides: a positive photosensitive composition that yields an insulation layer superior not only in high transparency, but also in heat resistance enduring a temperature during the production of a substrate, solvent resistance, and anti-aging property as a permanent resist; a positive permanent resist utilizing the positive photosensitive composition; and a method for producing the positive permanent resist. The present invention provides: a positive photosensitive composition containing (A) a curable silicone resin having a silanol group, which resin has a structure obtained by a reaction between one or more cyclic siloxane compounds represented by the following general formula (1):
and one or more arylalkoxysilane compounds represented by the following general formula (2):
, (B) diazonaphthoquinones, and (C) a solvent; a positive permanent resist using the positive photosensitive composition; and a method for producing the positive permanent resist.
本发明提供了:一种正性光敏组合物,该组合物作为永久抗蚀剂,不仅能产生高透明度的绝缘层,而且还能在基材生产过程中保持一定温度,具有耐热性、耐溶剂性和抗老化性;一种利用该正性光敏组合物的正性永久抗蚀剂;以及一种生产该正性永久抗蚀剂的方法。本发明提供:一种正感光组合物,其中含有 (A) 具有
硅烷醇基的可固化
硅树脂,该
树脂的结构是由一种或多种由下式通式 (1) 表示的环状
硅氧烷化合物反应得到的:
和一种或多种由以下通式(2)代表的芳基烷氧基
硅烷化合物反应而得到的结构:
(B) 重氮
萘醌,和 (C) 溶剂;使用该正性感光组合物的正性永久抗蚀剂;以及生产该正性永久抗蚀剂的方法。