Organic anti-reflective coating polymer, organic anti-reflective coating composition comprising the coating polymer and method for forming photoresist pattern using the coating composition
申请人:Jung Jae Chang
公开号:US20070228365A1
公开(公告)日:2007-10-04
An organic anti-reflective coating polymer suitable for use in formation of a photoresist pattern acting as an ion implantation barrier during fabrication of a semiconductor device.
The organic anti-reflective coating polymer has a weight-average molecular weight of 2,000-30,000 and is represented by Formula 1 below:
wherein R is hydrogen or methyl, R
1
-R9 are each independently hydrogen, C
1
-C
6
linear or branched alkyl, hydroxy, alkoxyalkyl, methoxycarbonyl, carboxyl, or hydroxymethyl, 1 is 1 or 2, m is 2, 3, or 4, and x, y, and z are each independently from 0.05 to 0.95.
一种有机抗反射涂层聚合物,适用于制备半导体器件期间形成光刻胶图案作为离子注入屏障。该有机抗反射涂层聚合物的重均分子量为2,000-30,000,由下式1表示:
其中R为氢或甲基,R1-R9各自独立地为氢、C1-C6线性或支链烷基、羟基、烷氧基烷基、甲氧基羧酸酯、羧基或羟甲基,1为1或2,m为2、3或4,x、y和z各自独立地为0.05至0.95。