Composition for resist underlayer film formation, resist underlayer film and forming method thereof, production method of patterned substrate, and compound
申请人:JSR CORPORATION
公开号:US11126084B2
公开(公告)日:2021-09-21
A composition for resist underlayer film formation contains a compound having a group represented by formula (1), and a solvent. R1 represents an organic group having 2 to 10 carbon atoms and having a valency of (m+n), wherein the carbon atoms include two carbon atoms that are adjacent to each other, with a hydroxy group or an alkoxy group bonding to one of the two carbon atoms, and with a hydrogen atom bonding to another of the two carbon atoms; L1 represents an ethynediyl group or a substituted or unsubstituted ethenediyl group; R2 represents a hydrogen atom or a monovalent organic group having 1 to 20 carbon atoms; n is an integer of 1 to 3; * denotes a bonding site to a moiety other than the group represented by the formula (1) in the compound; and m is an integer of 1 to 3.
COMPOSITION FOR RESIST UNDERLAYER FILM FORMATION, RESIST UNDERLAYER FILM AND FORMING METHOD THEREOF, PRODUCTION METHOD OF PATTERNED SUBSTRATE, AND COMPOUND
申请人:JSR CORPORATION
公开号:US20190243247A1
公开(公告)日:2019-08-08
A composition for resist underlayer film formation contains a compound having a group represented by formula (1), and a solvent. R
1
represents an organic group having 2 to 10 carbon atoms and having a valency of (m+n), wherein the carbon atoms include two carbon atoms that are adjacent to each other, with a hydroxy group or an alkoxy group bonding to one of the two carbon atoms, and with a hydrogen atom bonding to another of the two carbon atoms; L
1
represents an ethynediyl group or a substituted or unsubstituted ethenediyl group; R
2
represents a hydrogen atom or a monovalent organic group having 1 to 20 carbon atoms; n is an integer of 1 to 3; * denotes a bonding site to a moiety other than the group represented by the formula (1) in the compound; and m is an integer of 1 to 3.
US9284245B2
申请人:——
公开号:US9284245B2
公开(公告)日:2016-03-15
MONOMER FOR HARDMASK COMPOSITION AND HARDMASK COMPOSITION INCLUDING THE MONOMER AND METHOD OF FORMING PATTERNS USING THE HARDMASK COMPOSITION
申请人:LEE Sung-Jae
公开号:US20140186777A1
公开(公告)日:2014-07-03
A monomer for a hardmask composition represented by the following Chemical Formula 1,