Composition for forming titanium-containing resist underlayer film and patterning process
申请人:SHIN-ETSU CHEMICAL CO., LTD.
公开号:US09188866B2
公开(公告)日:2015-11-17
The invention provides a composition for forming a titanium-containing resist underlayer film comprising: as a component (A), compounds selected from titanium compounds represented by the following general formulae (A-1) and (A-2) and a titanium-containing compound obtained by hydrolysis and/or condensation of the titanium compounds, as a component (B), compounds selected from titanium compounds represented by the following general formulae (B-1) and (B-2) and a titanium-containing compound obtained by hydrolysis and/or condensation of the titanium compounds, and as a component (D), solvent. There can be provided a composition for forming a titanium-containing resist underlayer film to form a resist underlayer film having favorable pattern adhesiveness and excellent etching selectivity.
Ti(OR1A)4 (A-1)
Ti(OR1A)4−na(OR2AO)na (A-2)
Ti(OR1B)4 (B-1)
Ti(OR1B)4−nb(OR2BO)nb (B-2)
本发明提供了一种用于形成含钛抗蚀底层膜的组合物,包括:作为组分(A),选择自下列通式(A-1)和(A-2)所表示的钛化合物以及通过钛化合物的水解和/或缩合而获得的含钛化合物;作为组分(B),选择自下列通式(B-1)和(B-2)所表示的钛化合物以及通过钛化合物的水解和/或缩合而获得的含钛化合物;以及作为组分(D),溶剂。可以提供一种用于形成含钛抗蚀底层膜的组合物,以形成具有良好图案粘附性和优异蚀刻选择性的抗蚀底层膜。其中,通式(A-1)为Ti(OR1A)4,通式(A-2)为Ti(OR1A)4−na(OR2AO)na,通式(B-1)为Ti(OR1B)4,通式(B-2)为Ti(OR1B)4−nb(OR2BO)nb。