申请人:Kabushiki Kaisha Toshiba
公开号:US06440636B1
公开(公告)日:2002-08-27
A polymeric compound includes at least one monomeric unit of the following formula (I):
wherein R1 is a hydrogen atom or a methyl group; and each of R2 and R3 is independently a hydrogen atom or a hydroxyl group. The polymeric compound may include the monomeric unit and at least one monomeric unit selected from monomeric units represented by the following formulae (IIa) and (IIb):
wherein R1 is a hydrogen atom or a methyl group; each of R4 and R5 is, for example, a hydrogen atom, a hydroxyl group, an oxo group, or a carboxyl group, wherein R4 and R5 are not concurrently hydrogen atoms; and each of R7 and R8 is independently a hydrogen atom, a hydroxyl group, or an oxo group. The polymeric compound have a high etching resistance in addition to satisfactory transparency, alkali-solubility, and adhesion.
一种聚合物化合物包括至少一个以下式(I)的单体单位:其中R1是氢原子或甲基基团;R2和R3中的每一个都是独立的氢原子或羟基。该聚合物化合物可以包括该单体单位和至少一种由以下式(IIa)和(IIb)表示的单体单位:其中R1是氢原子或甲基基团;R4和R5中的每一个都可以是氢原子、羟基、氧代基或羧基,其中R4和R5不能同时是氢原子;R7和R8中的每一个都是独立的氢原子、羟基或氧代基。该聚合物化合物除了具有令人满意的透明度、碱溶性和附着力外,还具有高蚀刻抗性。